A comparison of two excitation modes for MEMS electrothermal displacement sensors
- Creator: Mohammadi, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2014
Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza , Behrens, Sam
- Resource Type: journal article
- Date: 2013
Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2011
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010
Ultrasonic energy transmission and conversion using a 2-D MEMS resonator
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010